UEFC-4900 - VACTEC GmbH

The Temescal UEFC-4900 with Auratus is the compace version of the UEFC-5700. 

It represents the ultimate mid-sized coater for lift-off processes. The source-to-

substrate distance and chamber angles in the UEFC-4900 have been optimized for 

150mm wafers and the system supports 25 x 150mm wafers.

The load locked product chamber is pumped by a CTI model CT-500 cryogenic pump. 

Powerful cryopumps make it possible to pump this large chamber in 15 minutes from 

atmosphere to pressures in the range of 10E-7. During wafer exchanges, the source 

chamber is maintained at high vacuum by the independent pumping of a dedicated 

10-inch cryopump.