Deposition Controllers - VACTEC GmbH

E-Beam Deposition Controllers

Now get everthing you want in a thin film deposition controller for single and multiple-

layer processes. The XTC/3 with patented ModeLock provides proven mode hop 

prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you 

get highly accurate control of deposition rate and thickness, the capacity for virtually 

any number of layers, easy installation and extremely high reliability to ensure 

productivity.

Technical Data
Available in single-layer and multiple-layer models.
Patented ModeLock technology prevents film thickness errors caused by mode-hopping.
Supports Inficon Crystal 12™, CrystalSix® and dual sensor automatic crystal switching 

for maximum productivity.

-XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 

 2 sensors and 2 sources.

-XTC/3S single-layer model supports up to 9 films, 2 sensors and 2 sources.

Easy-to-read TFT LCD graphics displays.
Films and processes can be assigned unique, descriptive names for easy retrieval.
Ethernet connection available
Free-standing (no computor necessary) or optional Windows® software for PC 

operation.
Plug-and-play replacement for Inficon XTC/2 controllers 

(limited to XTC/2 features and command set).