PopTop Multi-Pocket E-Guns - VACTEC GmbH

Temescal 3PT Multi-Pocket E-Gun

Virtually Eliminates Cross-Contamination
Temescal's patented PopTop® e-beam sources offer enhanced convenience, reliability, 

and throughput in applications ranging from optical and microelectronic production to 

specialized R & D coating. The key to these performance enhancements is Temescal's 

pneumatically actuated ‘PopTop’ crucible cover, which is raised automatically before 

turret rotation. The net benefit is the virtual elimination of cross-contamination.

Available Options
Temescal 3PT, rated up to 12kW
Temescal 2PT, rated up to 10kW

Features & Benefits
-Movable crucible cover, which rises before crucible is rotated
-Pneumatically driven, low-impact cover motion
-Lip of cover recessed around exposed pocket
-Raised structures on underside of cover interlock with crucible web walls
-Virtual elimination of cross-contamination
-Minimal deposition on web walls and on cover margins around exposed pocket
-Reduced risk of damage to source and turret indexer
-Removable/replaceable cover and crucible enable easy source convertibility
-Enhanced crucible cooling improves thermal stability during evaporation
-Adjustable internal and external pole piece extensions optimize beam spot control, 

 regardless of beam position
-Ultra-stable magnetics eliminate the need to regauss magnetic parts following 

 source disassembly
-Power ratings: 1-10 kW (Model 2PT) and 1-12 kW (Model 3PT)