FC/BCD-2800 - VACTEC GmbH

Temescal FC/BCD-2800

The Temscal FC-2800 and BCD-2800 are clean room-compatible coaters
that offer high-throughput efficiency and lift-off capability at a source-to-
substrate distance of either 34" (866mm) or 42" (1076mm).

The offset pumping port, the hinged door panels, and the swingout source
tray are high-value maintenance features in Temescal systems.

Key Features:
-Non-load-locked BCD-2800; load-locked FC-2800
-Product chamber dimensions: 28" high x 28" x 28"
-Standard source-to-substrate distance: 34"
-S-S distance with optional source well extension collar: 42"
-Source trays support multiple e-beam and resistance sources
-3cm or 5cm ion source available in product chamber
-Product and source chamber cryopumps

System Control
Temescal Control System (TCS), providing Auto, Manual, and Service Modes plus 

process datalogging. TCS-based process variable monitoring (PVM) allows user to 

set process tolerance alarms Inficon XTC/3 deposition controller Electron Beam 

Source, Power Supply, and Sweep Electron Beam Source, Power Supply, and Sweep
Temescal removeable-cover turret source, 4- or 6-pocket,
Temescal model CV-6SLX or CV-12SLX e-beam power supply,
Temescal SuperSweep64 programmable beam sweep controller Vacuum Pumping 

and Control