FC-4400 - VACTEC GmbH

Temescal FC-4400 Deposition System

The  FC-4400 represents Temescal`s ultimate high throughput
platform for lift-off orientated evaporation This system is designed
to support the metallization of 30 x 150mm wafers per load via
high capacity e-beam evaporation

The load locked, 44-inch x 44-inch x 28-inch product chamber can
be pumped as many as two dedicated, high throughput 16-inch
cryogenic pumps. The dual-cryopump option makes it possible to
pump this large chamber in 15 minutes from atmosphere to pressures
in the range of 10E-7. During wafer exchanges, the source chamber is
maintained at high vacuum by the independent pumping of a dedicated
10-inch cryopump.

-Product chamber dimensions: 23.5" high x 44" x 44",
-25.5" diameter source tray