FC/BJD-2000 - VACTEC GmbH

Temescal FC/BJD-2000
Temescal's BJD-2000 and FC-2000 are versatile evaporation systems that
accept a variety of accessories to meet almost any requirement. Engineered
for efficient operation and clean room compatibility, these systems combine
maximum flexibility with ease of use. The FC-2000 is a fast- cycle, load-locked
system that allows the source to remain under vacuum during substrate reloading.
The BJD-2000 is non-load-locked.
Convenient Maintenance

Key Features:
-Non-load-locked BJD-2000 and load-locked FC-2000, both with a single cryopump
-Source-tray supports multiple electron beam and resistance sources
-Standard source-to-substrate distance: 19.5"
-S-S distance with optional source well extension collar: 27.5"
-Field upgrade kit allows conversion into an FC-2800 or a BCD-2800

System Control
Temescal Control System (TCS), providing Auto, Manual, and Service Modes plus
process datalogging TCS-based process variable monitoring (PVM) allows user to
set process tolerance alarms.
-Inficon XTC/3 deposition controller
-Electron Beam Source, Power Supply, and Sweep
-Temescal removeable-cover turret source, 4- or 6-pocket
-Temescal model CV-6/12SLX electron beam power supply
-Temescal SuperSweep64 programmable beam sweep controller
-Vacuum Pumping and Control
-Edwards model XDS35i dry roughing pump, with a pumping speed of 21 cfm
 (35 m3/h-1)
-CTI model CT-8 On-Board cryopump, Edwards Active Inverted Magnetron gauges 

 and Pirani controllers, monitored and controlled by the TCS Cryopump temperature 

 monitoring.